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Vacuum Pump Product List

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Dry Pump Energy-Saving Attachment ECO-SHOCK

This is an attachment that significantly reduces the power consumption of your existing dry pump. *Please inquire about its usability. [ULVAC]

■ It is possible to significantly reduce the power consumption of dry pumps. This is particularly effective for multi-stage roots pumps. For other types of pumps, please inquire. ■ There is no decrease in exhaust speed across the entire pressure range. ■ Installation is easy.

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Oil rotary vacuum pump PKS series

It is a very robust large oil rotary vacuum pump with stable exhaust characteristics. [ULVAC]

The PKS series is a very robust large oil rotary vacuum pump with stable exhaust characteristics. It can be used in a wide range of applications, including the metal and automotive industries, as well as the chemical, pharmaceutical, and food industries. Disassembly and assembly are extremely easy, and inspecting the exhaust valve is also straightforward. 【Product Lineup】 ○PKS-016 ○PKS-030 ○PKS-070 For more details, please contact us or download the catalog.

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Gas Analyzer Software Qulee QCS

Software compatible with ULVAC's residual gas analyzers/process gas monitors.

"Qulee QCS" is software compatible with ULVAC's residual gas analyzers/process gas monitors. This software is compatible with most gas analyzers manufactured by ULVAC, allowing anyone to perform measurements and save data with simple click operations. 【Features】 ○ Standard software for Qulee → Standardly adopted across the entire Qulee series (compatible with Windows XP/7) ○ Easy operation → Simple operation with a comprehensive set of shortcut buttons ○ Rich measurement modes → Includes scan mode, trend mode, analog mode, sensitivity calibration mode, etc. ○ Enhanced leak test functionality → Easy leak checks possible with helium leak test mode ○ Gas composition name display available → Gas composition names can be displayed in scan mode For more details, please contact us or download the catalog.

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Dry Vacuum Pump CR Series

The exhaust chamber can achieve stable exhaust over a long period without using oil and without contact. 【ULVAC】

The CR series dry vacuum pumps are air-cooled, roots-type dry vacuum pumps. They do not use oil in the exhaust chamber, and the rotor and cylinder operate without contact, allowing for stable operation over long periods. No cooling water or nitrogen gas is required, contributing to reduced running costs. 【Product Lineup】 ○ CR16A ○ CR30A ○ CR60A ○ CR300A For more details, please contact us or download the catalog.

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Oil Rotary Vacuum Pump VD Series Ver.C

Adopted forced oil supply method! This is a vacuum pump that can be used for a wide range of applications. [ULVAC]

The VD Series Ver.C is an oil-sealed rotary vacuum pump equipped with ULVAC's original high-efficiency (IE3) multi-voltage motor. It features a two-stage vane design that achieves excellent ultimate pressure and has been optimized for low noise, making it suitable for a wide range of applications. One motor can accommodate a wide voltage range from 200-240V to 380-460V. The pump maintains stable exhaust speed even near atmospheric pressure, making it ideal for repeated continuous operation between atmospheric and vacuum conditions. 【Features】 ○ Equipped with ULVAC's original high-efficiency (IE3) multi-voltage motor ○ One motor can accommodate a wide voltage range ○ Utilizes a forced lubrication system ○ Stable exhaust speed even near atmospheric pressure ○ Options available for special applications → In addition to the standard model, three variants (A specification, B specification, H specification) are available for special applications. For more details, please contact us or download the catalog.

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Oil Rotary Vacuum Pump PVD Series

It is a vacuum pump with excellent ultimate pressure, suitable for a wide range of applications. 【ULVAC】

The PVD series is a compact oil rotary vacuum pump that has been a mainstay for many years, widely used by customers due to its reliability and ease of use. It is a two-stage rotary vane pump that excels in achieving low pressure, making it suitable for a wide range of applications. 【Features】 ○ Belt-driven compact oil rotary vacuum pump (rotary pump) ○ Excellent exhaust characteristics For more details, please contact us or download the catalog.

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YMV Series Base Unit for Mechanical Booster Pumps

Base unit for combining a mechanical booster pump and an oil rotary vacuum pump [ULVAC].

The YMV series is a frame unit designed to combine mechanical booster pumps and oil-sealed rotary vacuum pumps. Four types of frame units are available to match the pump displacement. The independent frame design emphasizes pump maintainability, making it ideal for use in production facilities. 【Lineup】 ○YMV-01A ○YMV-03A ○YMV-06A For more details, please contact us or download the catalog.

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Optical EB Gun EGP-1G

This is an electron beam evaporation source for optical film deposition that reduces costs. [ULVAC]

The EGP-1G is an electron beam evaporation source for optical film deposition that keeps costs down by adopting a simple 180° beam deflection method. Furthermore, by employing a two-sided positioning structure, it has a model with high beam position reproducibility after maintenance. 【Specifications】 ○ Electron beam deflection angle: 180° ○ Cooling water flow rate: 10L/min ○ Dimensions (W×D×H) excluding protrusions: 185mm×239mm×179mm ○ Weight: 11kg ○ Maximum output: 10kW For more details, please contact us or download the catalog.

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Dry Vacuum Pump GR Series

This is a pump with a simple structure designed for general industrial use. 【ULVAC】

The GR Series dry vacuum pumps are designed with a simple structure for general industry, based on the proven and reliable LR and HR series. They can be used for high-load applications such as repeated exhaust from atmospheric pressure to vacuum and continuous operation in high-pressure areas. They are ideal for exhausting load lock chambers that require high throughput. 【Product Lineup】 ○ GR60A ○ GR90A ○ GR180A For more details, please contact us or download the catalog.

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Dry Vacuum Pump ECO-SHOCK

This is a groundbreaking attachment that significantly reduces power consumption. 【ULVAC】

ECO-SHOCK is a revolutionary attachment that can significantly reduce the power consumption of your currently used dry pump by installing it on the dry pump. It is ideal for dry pumps used in inert gas exhaust applications. 【Features】 - Can reduce the power consumption of dry vacuum pumps by up to 80% - No decrease in exhaust speed across all pressure ranges - Easy to install For more details, please contact us or download the catalog.

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Optical Process Monitor Optius

You can monitor the status of various plasma processes in real time. 【ULVAC】

The optical process monitor Optius can monitor the status of various plasma processes in real-time by measuring the emission spectrum of the plasma. It is ideal for MFC control in reactive sputtering and endpoint detection in etching. 【Specifications】 ○ Weight: Main unit (TSC): 4.9kg Expansion unit (ESC, 1ch): 1.3kg ○ Power supply: AC100–240V (50/60Hz) ○ Power consumption: 100W (when using 5 channels) ○ Operating environment: Temperature: 10 – 40°C, Humidity: 15 – 80% RH (without condensation) For more details, please contact us or download the catalog.

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HPS-N Series EB Power Supply for Film Formation

This is a power supply compatible with electron beam evaporation sources, aimed at stabilizing the circuit and improving performance. [ULVAC]

The HPS-N series is a power supply compatible with electron beam evaporation sources, designed to stabilize circuits and improve performance based on Ulvac's many years of accumulated technology and achievements. By using it in combination with the EB Gun Controller EGC-10GS, it can support both EB guns for optical thin films and EB guns for metallic thin films. 【Product Lineup】 ○HPS-600N ○HPS-1000N ○EGC-10GS For more details, please contact us or download the catalog.

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G-TRAN Series Multi-Ion Gauge SH2-1/SH2-2

While enabling wideband measurements, we have significantly reduced running costs. 【ULVAC】

ULVAC has developed and commercialized the transducer-type "G-TRAN Series Multi-Ion Gauge" (patent pending), which allows for the connection of measuring elements with different measurement ranges. In conventional multi-principle vacuum gauges, we often hear customer feedback such as "a failure of one measuring element requires the complete replacement of all measuring elements," "the measuring elements are complex and prone to failure," and "the measuring elements are expensive." With this new approach, we can enable wide-range measurements while significantly reducing running costs and addressing low environmental impact. 【Product Lineup】 ○SH2-1 Standard Specification ○SH2-2 Serial Communication Specification For more details, please contact us or download the catalog.

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G-TRAN 1 Channel Display Unit ISG1

Pressure measurement display, pressure contact settings, and various operations can be easily performed, and the operating status is immediately clear. 【ULVAC】

This display is a 1-channel display compatible with the entire G-TRAN series and the CCM series. By connecting it to a measurement unit, pressure readings, pressure contact settings, and various operations can be easily performed, and the operational status can be understood at a glance. Control and measurement via remote operation are possible through the display unit. 【Features】 ○ 0-10V linear output ○ Setpoint output (3 points) ○ Input voltage is DC24V ○ Display section features easy-to-read LED ○ Compliant with CE standards For more details, please contact us or download the catalog.

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EB Gun for Metal Vapor Deposition EGN Series

This is an electron beam evaporation source developed with a focus on improving maintainability for metal deposition. 【ULVAC】

The EGN series is a metal vapor deposition electron beam evaporation source developed with a focus on improving maintenance. The adoption of a flat-top structure and a 15mm hearth deck reduces the coating area on the electron beam evaporation source, achieving high maintenance efficiency. 【Specifications】 ○ Electron beam deflection angle: 270° ○ Number of crucibles: 6 ○ Cooling water flow rate: 10L/min ○ Dimensions (W×D×H): 260mm×340mm×144mm ○ Weight: 28kg For more details, please contact us or download the catalog.

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Dry Pump Energy-Saving Attachment ECO-SHOCK ES4A

No decrease in exhaust speed! Significant reduction in power consumption of dry pumps is possible. [ULVAC]

ECO-SHOCK is an attachment that significantly reduces power consumption by being installed on dry pumps. The ES4A is ideal for applications that require frequent evacuation of the loading and unloading chamber, as well as for reducing the power consumption of dry pumps with long operating times at the target pressure, such as turbo molecular pump packs. It also helps to suppress heat generation in dry pumps, thereby reducing the power consumption of air conditioning equipment. 【Features】 - Contributes to energy saving in dry pumps - Effective with volumetric transfer type dry pumps - No decrease in pumping speed across all pressure ranges - Easy to install - Reduces heat generation and power consumption of air conditioning equipment For more details, please contact us or download the catalog.

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Vacuum Gauge G-TRAN Series Multi-Ion Gauge ST2-1/2-2

Improved measurement accuracy! Equipped with an LED that allows for easy confirmation of the vacuum gauge's status at a glance. [ULVAC]

The G-TRAN series vacuum gauge multi-ion gauge ST2-1/ST2-2 achieves long life by maximizing the advantages of the triode type, even in harsh environments for vacuum gauges. ULVAC has developed and commercialized an ion vacuum gauge that can measure accurately for a longer time, even in severe conditions. The triode type metal ion vacuum gauge significantly reduces running costs and can also contribute to improving the yield of various processes. 【Features】 ○ Triode type metal ion vacuum gauge (patent pending) ○ Small, metal measuring element ○ Wideband measurement ○ Measuring elements with different measurement ranges can be connected ○ Accurate atmospheric pressure measurement For more details, please contact us or download the catalog.

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Mechanical Booster Pump PRC-A/PMB-C(M) Series

Stable performance can be achieved even against vapors such as water vapor and solvents. 【ULVAC】

By combining with dry pumps, oil-sealed rotary vacuum pumps, water-sealed pumps, etc., it is possible to increase the exhaust speed in the range of 10,000 to 0.1 Pa, where the exhaust speed of the roughing pump decreases. The PRC-A series, like the PMB-C(M), is designed primarily for use in semiconductor and liquid crystal manufacturing processes that require cleanliness both inside and outside the pump, as well as for general-purpose applications. The PMB-040C and PMB-060C are optimal for large capacity exhaust in thermal treatment furnaces, melting furnaces, and large film deposition equipment. 【Product Lineup】 ○PMB-001C, CM ○PMB-003C, CM ○PRC-003A ○PRC-006A ○PRC-012A For more details, please contact us or download the catalog.

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G-TRAN Series Pirani Gauge

Pirani vacuum gauge capable of measuring from 3000 Pa to 0.4 Pa [ULVAC].

The sensor unit SP1 is a Pirani vacuum gauge that can measure from 3000 Pa to 0.4 Pa, featuring an integrated measuring element WP series and circuit section. This vacuum gauge eliminates the operation and display section from conventional controllers, focusing on the minimum necessary functions, which enables "cost reduction" and "space saving." 【Specifications】 ○ LED display: Power, Error, Set Point 1/2 ○ Power supply voltage: DC 24V ± 2V, 90mA (Max.) ○ Input/output connector: D-sub-15P (M2.6 screw) ○ Body weight: 190g (excluding measuring element) ○ Accessories: 1 set of input/output connectors, 1 instruction manual For more details, please contact us or download the catalog.

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Crystal Oscillator Film Deposition Controller CRTM-9100G

Quartz oscillator film deposition controller with low-rate deposition control and high-precision film thickness control [ULVAC].

The CRTM-9100G is a quartz crystal oscillator-based film deposition controller developed with the concept of balancing low cost and high functionality. It incorporates all the technologies that Ulvac has cultivated over many years as a manufacturer of quartz crystal oscillator-based film deposition controllers, including continuous deposition of multilayer films, simultaneous deposition control of up to four components, and low rate control. It can be utilized for a long time in various deposition processes. 【Specifications】 ○Dimensions: W×D×H 480mm×350mm×149mm ○Weight: Approximately 8kg ○Utility: AC 85 – 230V 50/60Hz ○Power Consumption: 60W Max ○Operating Environment: Temperature: 5 – 40℃, Humidity: 5 – 95% RH (without condensation) For more details, please contact us or download the catalog.

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Crystal Oscillator Film Deposition Controller CRTM-6000G

From single-layer films to multi-layer films, it can be used for a wide range of deposition control. 【ULVAC】

The CRTM-6000G is a quartz oscillator-based film deposition controller that excels in cost performance while enhancing the fundamental capabilities required of a film deposition controller. Despite its compact half-rack size, it is capable of low-rate control and continuous deposition control for multilayer films up to 99 layers. 【Specifications】 ○ Dimensions: W×D×H 240mm×350mm×99mm ○ Weight: Approximately 3.6kg ○ Utility: AC85 ~ 230V 50/60Hz ○ Power Consumption: 30W Max ○ Operating Environment: Temperature: 5 ~ 40℃, Humidity: 5 ~ 95% RH (without condensation) For more details, please contact us or download the catalog.

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G-TRAN Series 4 Channel Display Unit IM1R1

Up to 4 measurement units can be connected, allowing simultaneous measurement and display. 【ULVAC】

The 4-channel display unit can connect up to 4 measurement units, allowing simultaneous measurement and display. It comes standard with 8-point setpoint output and I/O communication control functions. With the linkage function between the atmospheric pressure Pirani gauge or the Pirani gauge and the ion gauge, it enables easy measurement of a wide range of pressures. 【Features】 ○ Adopts 96mm DIN size ○ Input voltage can be selected from DC24V or AC100V ○ Capable of connecting up to 4 measurement units ○ Simultaneous measurement and output for each sensor (CH1-4) ○ Linked measurement possible between IG (CH1) and PG (CH2) For more details, please contact us or download the catalog.

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Dry Vacuum Pump LR/HR/UR Series

Achieved high durability in hard processes such as CVD and dry etching. [ULVAC]

The LR/HR/UR series has achieved high durability in hard processes such as CVD and dry etching through the effective utilization of compression heat, thanks to its unique high-temperature uniform heating technology. In light processes, it is possible to reduce power consumption by up to approximately 70% in combination with ECO-SHOCK. Additionally, it improves maintainability and reduces noise, and all models are CE compliant (optional). 【Product Lineup】 ○ LR/HR60 ○ LR/HR90 ○ LR180 ○ LR421 ○ LR421-T, etc. For more details, please contact us or download the catalog.

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Oil rotary vacuum pump VS650A/VS750A

It is possible to reduce the burden associated with the installation of pumps for foundation work and other related tasks. 【ULVAC】

The VS650A/VS750A is a single-stage vane type (rotary wing type) oil rotary vacuum pump. It offers a large exhaust capacity and stable exhaust performance, and its low vibration helps reduce the burden associated with pump installation for foundation work. Additionally, you can choose between air cooling and water cooling, so please select according to your installation environment. 【Product Lineup】 ○VS650A-A ○VS650A-W ○VS750A-A ○VS750A-W For more details, please contact us or download the catalog.

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Abnormal Discharge Prevention Unit A2K Series

High throughput! Large capacity is possible with master-slave connections. [ULVAC]

The A2K series is an abnormal discharge prevention unit that applies a positive voltage pulse to a DC power supply in a reactive sputtering process to neutralize the charge on the target. By reducing abnormal discharges, it enables high power input. The A2K-20K and 40K can be operated in parallel with up to six units each. It is possible to synchronize the output pulses of multiple A2K units. It can be easily installed on existing equipment, achieving improved yield and throughput at a low cost. 【Features】 ○ High throughput ○ Reduced substrate damage ○ Suppressed substrate temperature ○ Simple connectivity ○ Adjustable reverse pulse frequency For more details, please contact us or download the catalog.

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Oil Rotary Vacuum Pump VD Series

This is an oil rotary vacuum pump developed as a "low noise type pump." [ULVAC]

The VD series is a motor-directly coupled oil rotary vacuum pump developed as a "low-noise type pump." It can be used for a wide range of exhaust applications, from deposition and sputtering equipment to vacuum packaging machines, serving as the core pump for creating vacuum. There is a strong demand for "quietness" in vacuum pumps to improve the working environment. The VD series is a low-noise motor-directly coupled oil rotary vacuum pump developed in response to such requests. Additionally, it is designed with maintenance in mind, making routine maintenance and inspections very easy. It can be used in a wide range of applications, from laboratories that require quietness to various production lines. 【Features】 ○ Low noise ○ Excellent maintainability ○ Stable exhaust even at high pressures near atmospheric pressure For more details, please contact us or download the catalog.

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Oil Rotary Vacuum Pump VS Series

This is a motor-directly connected oil rotary vacuum pump that achieves compact size, lightweight, and low vibration. [ULVAC]

The VS series is a motor-direct oil rotary vacuum pump that achieves simplification and high speed through the adoption of a single-stage vane type (rotor type), resulting in a compact, lightweight, and low-vibration design. By significantly reducing vibrations, it alleviates the burden associated with pump installation, such as foundation work in factory buildings. Additionally, the enhancement of the oil circulation and cooling systems ensures stable exhaust performance at high intake pressures, making it suitable for a wide range of applications, including processes with frequent exhaust cycles. 【Features】 ○ Low vibration and low noise ○ Lightweight and compact ○ Excellent maintainability For more details, please contact us or download the catalog.

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Turbo Molecular Pump Exhaust Unit YTP Series

This is an exhaust unit capable of evacuating from atmospheric pressure to high vacuum. [ULVAC]

The YTP series is an exhaust unit capable of evacuating from atmospheric pressure to high vacuum, using the turbo molecular pump UTM series, which employs "pivot bearings + magnetic bearings (permanent magnets)." It is available in two types: the SA type, which can be automatically evacuated with a START/STOP switch, and the manual operation M type. 【Features】 ○ Two types available: automatic operation type (YTP-SA series) and manual operation type (YTP-M series), with four selectable exhaust speeds ○ In the event of a power outage, the fore valve automatically closes and the rotary pump is automatically vented → Even after power is restored, the exhaust unit will not operate ○ The saturation vapor pressure of the fluorinated oil used in the turbo molecular pump is around 10^-11 Pa (at 20°C), making it virtually oil-free ○ The turbo molecular pump uses high-performance bearings, eliminating the need for troublesome oil changes or bearing replacements For more details, please contact us or download the catalog.

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Ultra-high vacuum introduction device, zero-length viewport

This is a variety of introduction devices compatible with ultra-high vacuum using UFC flanges. 【ULVAC】

This is a variety of feedthroughs compatible with ultra-high vacuum using UFC flanges (bakeable flanges with knife-edge type metal seal). The CMS series is for current and voltage, the TDU series is for rotational motion, and the TSU series is for linear motion, all designed to introduce these elements into an ultra-high vacuum chamber without leakage from the atmosphere. The TVU series is a viewport for observing the interior of the ultra-high vacuum chamber from the atmosphere with a wide field of view. 【Product Lineup】 ○ Current feedthrough terminal: CMS series ○ Ultra-high vacuum rotary feedthrough terminal: TDU series ○ Ultra-high vacuum linear feedthrough terminal: TSU series ○ Ultra-high vacuum zero-length viewport: TVU series For more details, please contact us or download the catalog.

  • Vacuum Equipment
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